|
System |
|
|
Targeting microscopic camera |
8mm FOV [100X with 15in. Monitor] |
|
Probe tip radius |
≦5μm；2μm(optional) |
|
Probe material |
Diamond coated |
|
Stylus force |
0.1- 50mg |
|
Sample stage dimension |
75mm x 75mm |
|
Recommended sample thickness |
≦10 mm |
|
Recommended sample weight |
≦50g |
|
Computer system |
CPU:1GHz ; RAM: 2G UP; USB 2.0 |
|
Software |
EZSTEP software running under Windows XP or later
Profile measurement software
Report generator software |
|
Vibration isolation |
Vibration filter software
Vibration sensor
Vibration isolation table (optional) |
|
XY manual linear stage travel distance |
25mm*25 mm |
|
Performance |
|
|
Vertical measuring range |
15 μm (typical,13.5μm); 30μm (optional) |
|
Vertical measuring resolution |
2Å (least significant bit) |
|
Step height repeatability |
0.5nm+0.1%Step Height |
|
Horizontal scanning range |
1mm(typically, 900um minimum) |
|
Horizontal measuring resolution |
1um at 500 scan points to 0.1um at 5000 scan points |
|
Data points per scanning line |
500,1000,2500,5000 points |
|
Scan speed |
1um/sec to 100um/sec |
|
Software |
|
|
Step analysis |
Point-to-point, Avg. step height |
|
Roughness and waviness analysis |
Ra,Rq,Rp,Rz,Ry,Rmax,Wa,Wq,Wp,Wz,Wy,Wmax |
|
Filter |
Moving average, Low pass, High pass |
|
High order flatten |
Yes |
|
Raw data export |
YES
(formatted text file,XPS,Excel and Matlab compatible) |
|
Scan report generator |
YES |
|
Facility Requirements |
|
|
Power |
100 to 240 VAC, 50/60Hz, 1.2A , 60W |
|
Dimensions |
270mm W x 280mm D x 250mm H |
|
Weight |
10kg |
|
Temperature range |
10 to 30 ℃ |
|
Humidity range |
≦65% |
